Built-In Self Test of CMOS-MEMS Accelerometers
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چکیده
منابع مشابه
Generation of Electrically Induced Stimuli for MEMS Self-Test
A major task for the implementation of Built-In-Self-Test (BIST) strategies for MEMS is the generation of the test stimuli. These devices can work in different energy domains and are thus designed to sense signals which are generally not electrical. In this work, we describe, for different types of MEMS, how the required non-electrical test stimuli can be induced on-chip by means of electrical ...
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تاریخ انتشار 2002